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Product Features
Features of Electrostatic Chuck Products:
Applications: Photolithography process, etching process, thin film deposition process, ion implantation process;
Material:
1. Surface ceramic materials: aluminum nitride ceramic, aluminum oxide ceramic;
2. Electrode materials: usually metal materials such as copper, aluminum, etc., often plated with a layer of corrosion-resistant and high-temperature resistant metal or alloy;
Size: Suitable for 4-inch, 6-inch, 8-inch, and 12-inch wafers.
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Shanghai Headquarters
Hapoin Enterprise was
Address: Building 6, Southern Metropolis Garden, No. 1165, Jindu Road, Minhang District, Shanghai
Inquiry Hotline:+86 150 2686 5822
Email:info@hapoin.com
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Shenzhen Hengpeng Ruihe Technology Co., Ltd.
Address: Room 302, 3rd Floor, Building B, Kaicheng High-tech Park, Dalang Street, Longhua District, Shenzhen
Inquiry Hotline:+86 0755 2223 2285
Email:sales@hapoin.com
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Address: Unit 917A, 9/F., Tower A, New Mandarin Plaza, No. 14 Science Museum Road
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Address: 6th Floor, CTM Office Building, No. 139, Zhipiao Road, Zhipiao District, Hanoi, Vietnam
Telephone:+84 243 796 0048
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Japan Hengpeng Co., Ltd.
Address: 6th Floor, 2-3-8 Iwamotocho, Chiyoda-ku, Tokyo
Telephone:+81 070 9356 1267
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Kunshan Operation Center
Shanghai Hengpeng Enterprise - Kunshan Operation Center
Address: 10th Floor, Building B, Modern Plaza, No. 8, Weiye Road, Yushan Town, Kunshan City
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Email:sales@hapoin.com
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Address: No. 14, Alley 3, Lane 250, Section 2, Huanhe South Road, Taipei 10853
Telephone:+886 02 2336 2202
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Shanghai Hengpeng Enterprise - Beijing Office
Address: Room 306, Building 4, Zhongtou Oriental, West Zhihe North, Chaoyang District, Beijing
Telephone:+86 150 2686 5822
Email:sales@hapoin.com
Contact Number
Headquarter Address
6, South Metropolis Garden, No. 1165, Jindu Road, Minhang District, Shanghai
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