Semiconductor cavity structural components
HAPOIN
Semiconductor cavity structural components
Product Video
Product Overview
Product Features
Overview of HAPOIN Semiconductor Cavity Structural Components:
Applications:
Key components for semiconductor PVD, CVD, ETCH cavities;
Product Advantages:
Corrosion resistance, insulation, plasma resistance;
Material Purity:
99.7%, 99.8%, 99.9% alumina;
Size Specifications:
Disk diameter up to φ650mm (strip up to 2000mm) can be processed;
Process Types:
Isostatic pressing forming, sintering, finishing, etc.;
Precision Range:
Dimensional tolerance ±0.01mm; flatness up to 0.002mm; roughness Ra0.2.
Product Specifications
Product Advantages
Application Areas
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Contact Number
Headquarter Address
6, South Metropolis Garden, No. 1165, Jindu Road, Minhang District, Shanghai
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