MBE Device
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  • MBE Device

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Product Overview

Product Features

MBE Device MBE-260 Overview:

This MBE equipment is an ultra-high vacuum device that can be excited by externally introduced lasers in a vacuum and deposit materials onto substrates;

MBE Device MBE-260 Specifications:

Configure;

Spec;

Processing room and vacuum exhaust system;

Chamber Sharp;

φ260mm Spherical SUS;

Reaching vacuum;

Less than 6.7×10⁻⁷ Pa (5×10⁻⁹ Torr);

Ceramic bearing;

Turbo pump;

250 L/s;

Target revolution unit;

φ20mm×6 axes;

Rotation / revolution motor drive (PC control);

Substrate heating unit;

Infrared lamp substrate heating unit (can be changed to semiconductor;

laser substrate heating unit);

Size of substrate;

10mm;

Maximum;

Heating temperature;

Above 800℃;

Common specification;

Power supply / control rack (JIS standard compliant) integrated chamber frame;

PLD automatic control system (PC and control software).

 

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