4-axis horizontal multi-joint clean robotic arm

JEL

GCR4280-300-AM


4-axis horizontal multi-joint clean robotic arm
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  • 4-axis horizontal multi-joint clean robotic arm

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Product Overview

Product Features

Features of JEL GCR4280-300-AM Wafer Robot Arm:

Multi-axis type for ultra-clean rooms, 4-axis horizontal multi-joint clean robot GCR4000-AM series;

Suitable for wafer handling in semiconductor manufacturing equipment supporting 300mm wafers, inspection equipment, etc.;

The robot arm can independently handle 3 FOUPs;

Base fixing method or flange fixing method can be selected according to equipment requirements;

Equipped with motion monitor:

All axes use AC servo motors with absolute encoder specifications;

S-curve acceleration and deceleration control enables high-speed, high-precision handling of glass substrates;

Finger materials: CFRP (carbon fiber), aluminum alloy, high-purity ceramics, and various other selectable materials;

Fingers can be provided according to the type of object being handled and equipment layout requirements.

 

Product Specifications

Operating Environment Atmospheric Environment Inside Cleanroom
Arm Single Arm
Reach Distance 553mm (Reach distance to the center of the 3rd joint of the arm)
Maximum Stroke of Lifting Axis 300mm
Payload Capacity Less than 4kg (Reference at the 3rd joint of the arm)
Product Model Maximum Stroke of Lifting Axis
GCR4280-300-AM300mm

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