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Product Overview
Product Features
Features of JEL GCR4210 Wafer Robot Arm:
Multi-axis type for ultra-clean rooms, 4-axis horizontal multi-joint clean robot GCR4000-AM series;
Suitable for wafer handling inside semiconductor manufacturing equipment supporting 300mm wafers, inspection devices, etc.;
Standard arm lengths of the robot arm: 210mm, 280mm;
The robot arm can independently handle 2 FOUPs;
Base fixing method or flange fixing method can be selected according to equipment requirements;
Equipped with motion monitor;
Control communication methods: RS232C and parallel I/O interface;
All axes use AC servo motors with absolute value encoder specifications;
S-curve acceleration and deceleration control enables high-speed, high-precision handling of glass substrates;
Adoption of AC servo motors and optimization of motion trajectories achieve high-speed handling operations;
1.8 times faster than the GHR4000 type;
Wafer fixing methods: vacuum adsorption, bottom support, edge clamping, Bernoulli non-contact type;
Finger materials: CFRP (carbon fiber), aluminum alloy, high-purity ceramics, and various other selectable materials;
Fingers can be provided according to the type of object being handled and equipment layout requirements.
Product Specifications
| Operating Environment | Atmospheric Environment Inside Cleanroom |
| Arm | Single Arm |
| Reach Distance | 400mm (Reach distance to the center of the 3rd joint of the arm) |
| Maximum Stroke of Lifting Axis | 300mm / 400mm / 500mm |
| Payload Capacity | 4kg (Reference at the 3rd joint of the arm) |
| Product Model | Maximum Stroke of Lifting Axis |
| GCR4210-300-AM | 300mm |
| GCR4210-320-AM | 320mm |
| GCR4210-500-AM | 500mm |
Product Advantages
Application Areas
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Address: Building 6, Southern Metropolis Garden, No. 1165, Jindu Road, Minhang District, Shanghai
Telephone:+86 150 2686 5822
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