Waterproof 3-axis cylindrical coordinate type wafer handling robotic arm
JEL
SWCR3160CS
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Product Overview
Product Features
Features of JEL SWCR3160CS Wafer Robot Arm:
Waterproof 3-axis cylindrical coordinate robot arm SWCR3000 series (equipped with 300mm wafer flipping mechanism + edge clamping mechanism);
Under protection level IP64 LSI semiconductor manufacturing process conditions, capable of handling semiconductor wafers in acidic and alkaline environments;
The arm part uses Teflon coating to ensure corrosion resistance;
Waterproof structure at the arm joint uses V-shaped sealing rings;
The mating surfaces between parts use Viton material sealing strips;
The waterproof structure of the Z-axis can use bellows;
Equipped with motion monitor:
Control communication methods: RS232C and parallel port I/O methods;
All axes use 2-phase stepper motors;
S-curve acceleration and deceleration control method enables high-speed, high-precision handling of semiconductor wafers;
Wafer fixing methods: vacuum adsorption type, bottom support type, edge clamping type;
Fingers can be provided according to the actual situation of the handled objects and customer equipment layout.
Product Specifications
| Operating Environment | Atmospheric Environment Inside Cleanroom |
| Arm | Single Arm |
| Reach Distance | 312mm (Reach distance to the center of the arm's 3rd joint) |
| Maximum Travel of Lifting Axis | 200mm / 300mm |
| Payload Capacity | Below 3kg (Reference at the arm's 3rd joint) |
| Product Model | Maximum Travel of Lifting Axis |
| SWCR3160CS-200-PM | 200mm |
| SWCR3160CS-300-PM | 300mm |
Product Advantages
Application Areas
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OUTLETS
Service Outlets
Shanghai-Head Office
Shanghai Hapoin Enterprise Development Co., Ltd.
Address: Building 6, Southern Metropolis Garden, No. 1165, Jindu Road, Minhang District, Shanghai
Telephone:+86 150 2686 5822
Email:info@hapoin.com
Shenzhen Branch
Shenzhen Hapoin Ruihe Technology Development Co., Ltd.
Address: Room 302, 3rd Floor, Building B, Kaicheng High-tech Park, Dalang Street, Longhua District, Shenzhen
Telephone:+86 0755 2223 2285
Email:sales@hapoin.com
Hong Kong Branch
HAPOIN ENTERPISE LIMITED
Address: Unit 917A, 9/F., Tower A, New Mandarin Plaza, No. 14 Science Museum Road
Telephone:+00852 61187991
Email:sales@hapoin.com
Vietnam Branch
HAPOIN VIETNAM
Address: 6th Floor, CTM Office Building, No. 139, Zhipiao Road, Zhipiao District, Hanoi, Vietnam
Telephone:+84 398 848 969
Email:sales@hapoin.com
Japan Branch
HAPOIN CO., LTD.
Address: 6th Floor, 2-3-8 Iwamotocho, Chiyoda-ku, Tokyo
Telephone:+81 070 9356 1267
Email:sales@hapoin.com
Kunshan Office
Kunshan Office
Address: 10th Floor, Building B, Modern Plaza, No. 8, Weiye Road, Yushan Town, Kunshan City
Telephone:+86 150 2686 5822
Email:sales@hapoin.com
Taipei Branch
Uniwin Chemical Co.,LTD.
Address: No. 14, Alley 3, Lane 250, Section 2, Huanhe South Road, Taipei 10853
Telephone:+886 02 2336 2202
Email:sales@hapoin.com
Beijing Office
Beijing Office
Address: Room 306, Building 4, Zhongtou Oriental, West Zhihe North, Chaoyang District, Beijing
Telephone:+86 150 2686 5822
Email:sales@hapoin.com
Contact Number
Headquarter Address
6, South Metropolis Garden, No. 1165, Jindu Road, Minhang District, Shanghai
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