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Product Overview
Product Features
Features of JEL SVCR3260 Wafer Robot Arm:
Vacuum 3-axis cylindrical coordinate robot arm SVCR3000 series. Suitable for wafer handling inside vacuum chambers;
Compared to the SVHR series robot arms, it can handle twice the mass, offering better cost-performance advantages;
Additionally, it maintains compatibility with the SVHR series robot arms, facilitating equipment upgrades and modifications for customers;
Standard arm lengths of the robot arm: 160mm, 190mm, 260mm, 330mm;
Magnetic fluid sealing device used at the arm joints;
Vacuum sealing: magnetic fluid sealing device and bellows;
Method to improve cleanliness: installation of 5µm grade filters at the arm's internal exhaust ports;
Equipped with motion monitor:
Control communication methods: RS232C and parallel port I/O;
All axes use 2-phase stepper motors:
S-curve acceleration and deceleration control enables high-speed, high-precision semiconductor wafer handling;
Optional 2-phase stepper motor specifications available:
Finger materials: CFRP (carbon fiber), aluminum alloy, high-purity ceramics, and various other selectable materials;
Wafer fixing method: bottom support type, edge clamping using the wafer's own weight;
Custom fingers can be provided based on the actual handling objects and customer equipment layout.
Product Specifications
| Operating Environment | Vacuum Section: Temperature 15℃～50℃ Inside Drive Structure: Atmospheric environment inside cleanroom Temperature 15℃～40℃ |
| Arm | Single Arm |
| Reach Distance | 520mm (Reach distance to the center of the 3rd joint of the arm) |
| Maximum Stroke of Lifting Axis | 20mm / 40mm |
| Load Capacity | 2kg (Reference at the 3rd joint of the arm) |
| Product Model | Maximum Stroke of Lifting Axis |
| SVCR3260-020-PM | 20mm |
| SVCR3260-040-PM | 40mm |
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Shanghai-Head Office
Shanghai Hapoin Enterprise Development Co., Ltd.
Address: Building 6, Southern Metropolis Garden, No. 1165, Jindu Road, Minhang District, Shanghai
Telephone:+86 150 2686 5822
Email:info@hapoin.com
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Shenzhen Hapoin Ruihe Technology Development Co., Ltd.
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Address: Room 306, Building 4, Zhongtou Oriental, West Zhihe North, Chaoyang District, Beijing
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6, South Metropolis Garden, No. 1165, Jindu Road, Minhang District, Shanghai
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