Wafer Calibrator

JEL

SAL3482HV


Wafer Calibrator
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  • Wafer Calibrator

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Product Overview

Product Features

Features of JEL Wafer Calibrator SAL3262HV:

Suitable for 2, 3 inch, 100-150 mm wafers;

Applicable for position calibration of wafers made of different materials such as silicon wafers, silicon wafers with BG tape (milky white), transparent, and semi-transparent wafers;

Uses a self-developed image recognition sensor, with an integrated design that incorporates the controller and motor driver inside the device body;

The spindle diameter, shape, and material can be changed according to wafer size and material, and Bernoulli suction method can be used;

Control method: Serial port RS232C or parallel optical I/O port;

Custom designs can be provided for notch and edge shapes that do not conform to SEMI specifications;

Able to add a Z-axis to the spindle to meet the wafer lifting requirements;

The wafer re-pickup action allows selection and setting of the Z-axis;

For detailed parameters, please feel free to contact us.

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