3-Axis Cylindrical Coordinate Clean Robot Arm

JEL

SCR3160CSN


3-Axis Cylindrical Coordinate Clean Robot Arm
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  • 3-Axis Cylindrical Coordinate Clean Robot Arm

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Product Overview

Product Features

Features of JEL SCR3160CSN Wafer Robot Arm:

Closed-loop control type robot arm with suspected multi-axis specifications

Can transport to adjacent open/close safety door stations without a horizontal moving axis; flexible layout design reduces costs

3-axis cylindrical coordinate clean robot arm suitable for super cleanroom requirements

Solves common step loss issues of stepper motors while maintaining high cost performance and high-speed transmission characteristics,

New single-arm robot arm suitable for 2-inch to 300mm wafer transfer

Uses closed-loop control method that prevents motor step loss even under sudden load changes or excessive acceleration/deceleration,

Effectively improves the reliability of the robot arm

Motor equipped with absolute encoder, allowing the robot arm to know its position under any circumstances,

Reduces the time for each motion axis of the robot arm to find its home position

The absolute encoder is mechanical and does not require battery replacement

Compatible with older models of our products (installation dimensions and performance interchangeable), facilitating upgrades of existing equipment for customers

High-strength arm; the third joint of the arm can withstand a force of 3kg (including wrist mechanism module, fingers, and wafer weight)

Standard robot arm lengths: 100mm, 130mm, 160mm, 200mm

Base fixing method or flange fixing method can be selected according to equipment layout

Optional Bernoulli type fingers (Option)

 

Product Specifications

Operating Environment Atmospheric Environment Inside Cleanroom
Arm Single Arm
Reach Distance 340mm (Reach distance to the center of the 3rd joint of the arm)
Maximum Travel of Lifting Axis 200mm / 300mm / 400mm / 450mm / 500mm
Payload Capacity 3kg (Reference at the 3rd joint of the arm)
Product Model Maximum Travel of Lifting Axis
SCR3160CSN-200-CM200mm
SCR3160CSN-300-CM 300mm
SCR3160CSN-400-CM400mm
SCR3160CSN-450-CM450mm
SCR3160CSN-500-CM500mm

 

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